Structural and optical properties of zinc oxide film prepared using RF-sputtering technique for glugose biosensor

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Structural and optical properties of zinc oxide film prepared using RF-sputtering technique for glugose biosensor

A zinc oxide (ZnO) thin film is fabricated on Si (110) substrate using the radio frequency sputtering technique. The good structural properties of the ZnO thin film on the Si substrate was confirmed via high resolution X-ray diffraction (HRXRD) and by scanning electron microscopy. The photoluminesce...

書誌詳細
出版年:	International Journal of Electrochemical Science
第一著者:	Hashim A.J.; Ghazai A.J.; Jaafar M.S.; Mansor N.; Zain Z.
フォーマット:	論文
言語:	English
出版事項:	Electrochemical Science Group 2012
オンライン･アクセス:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84871137203&doi=10.1016%2fs1452-3981%2823%2916510-2&partnerID=40&md5=2478255148fd52fa9c1ddecd8ede1e1f

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