Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF power....
| 發表在: | Advanced Materials Research |
|---|---|
| 主要作者: | |
| 格式: | Conference paper |
| 語言: | English |
| 出版: |
2012
|
| 在線閱讀: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869433994&doi=10.4028%2fwww.scientific.net%2fAMR.576.598&partnerID=40&md5=5f5cd7463214dd79895e74cebb2138a4 |