Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF power....
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2012
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869433994&doi=10.4028%2fwww.scientific.net%2fAMR.576.598&partnerID=40&md5=5f5cd7463214dd79895e74cebb2138a4 |