Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power

ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF power....

詳細記述

書誌詳細
出版年:Advanced Materials Research
第一著者: Sauki N.S.M.; Herman S.H.; Ani M.H.; Mahmood M.R.
フォーマット: Conference paper
言語:English
出版事項: 2012
オンライン・アクセス:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869433994&doi=10.4028%2fwww.scientific.net%2fAMR.576.598&partnerID=40&md5=5f5cd7463214dd79895e74cebb2138a4