Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power

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Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power

ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF power....

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Bibliographic Details
Published in:	Advanced Materials Research
Main Author:	Sauki N.S.M.; Herman S.H.; Ani M.H.; Mahmood M.R.
Format:	Conference paper
Language:	English
Published:	2012
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869433994&doi=10.4028%2fwww.scientific.net%2fAMR.576.598&partnerID=40&md5=5f5cd7463214dd79895e74cebb2138a4

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