The effect of camphor oil amounts on the properties of amorphous carbon thin films by thermal chemical vapor deposition

• Published in: Advanced Materials Research
• Main Author: Dayana K.; Fadzilah A.N.; Rusop M.
• Format: Conference paper
• Language: English
• Published: 2012
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869410633&doi=10.4028%2fwww.scientific.net%2fAMR.576.611&partnerID=40&md5=2471b93c7d234849016765272605de91

Amorphous carbon thin films have been deposited by a simple Thermal Chemical Vapor Deposition (CVD) with varying the amount of natural precursor (camphor oil) onto the glass substrates. In this work, we have investigated the effect of different amount of camphor oil on the evolution of electrical conductivity and the optical and structural properties of amorphous carbon thin films. The amorphous carbon thin films were characterized by using current-voltage (I-V) measurement, UV-VIS-NIR spectroscopy and Raman spectroscopy. The current-voltage (I-V) study reveals that the highest electrical conductivity was deposited at 3 ml camphor oil. The optical band gap is almost unchanged with the increase of camphor oil amount. Raman result indicates that amorphous carbon thin films consists a mixture of sp2 and sp3 bonded carbon atoms. © (2012) Trans Tech Publications, Switzerland.