The effect of camphor oil amounts on the properties of amorphous carbon thin films by thermal chemical vapor deposition
Amorphous carbon thin films have been deposited by a simple Thermal Chemical Vapor Deposition (CVD) with varying the amount of natural precursor (camphor oil) onto the glass substrates. In this work, we have investigated the effect of different amount of camphor oil on the evolution of electrical co...
Published in: | Advanced Materials Research |
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Main Author: | |
Format: | Conference paper |
Language: | English |
Published: |
2012
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Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869410633&doi=10.4028%2fwww.scientific.net%2fAMR.576.611&partnerID=40&md5=2471b93c7d234849016765272605de91 |