Crystalline and structural properties dependence on RF power and deposition temperature of sputtered nanocrystalline silicon thin films on teflon and glass substrates
Nanocrystalline silicon (nc-Si) thin films were deposited on glass and polytetrafluoroethylene (PTFE, teflon) substrates using Radio frequency (RF) magnetron sputtering. The effect of RF power and deposition temperature on the physical and structural properties of nc- Si on the glass and Teflon subs...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2012
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869385403&doi=10.4028%2fwww.scientific.net%2fAMR.576.475&partnerID=40&md5=46cb8b22aeebb97bf9aa762febe94269 |