Effects of annealing temperature on RF behaviour of Mg 0.2Zn 0.8O thin films

The preparation of Mg 0.2Zn 0.8O thin films using sol gel spin coating technique is described. The films will be used as an alternative dielectric material for monolithic microwave integrated circuit (MMIC). In this work, the samples were annealed at various temperatures in order to investigate the...

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Bibliographic Details
Published in:2011 IEEE International RF and Microwave Conference, RFM 2011 - Proceedings
Main Author: Ahmad R.; Nadzar H.; Teh A.; Kara M.; Awang Z.; Salina M.; Mamat M.H.; Rusop M.
Format: Conference paper
Language:English
Published: 2011
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84859986670&doi=10.1109%2fRFM.2011.6168754&partnerID=40&md5=8ad4b5c10c7c988465409cc3ab85875e