Effect of deposition time SnO 2 thin film deposited using thermal CVD for humidity sensor application

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Effect of deposition time SnO 2 thin film deposited using thermal CVD for humidity sensor application

The effect of SnO 2 thin film thickness as humidity sensor application has been investigated. In this paper, Humidity sensitivity of SnO 2 thin film at different thickness deposited by thermal chemical vapor deposition were presented. The electrical, optical and structural properties of SnO 2 thin f...

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Bibliographic Details
Published in:	2011 IEEE Symposium on Industrial Electronics and Applications, ISIEA 2011
Main Author:	Sin N.D.Md.; Kamaruddin S.A.; Musa M.Z.; Rusop M.
Format:	Conference paper
Language:	English
Published:	2011
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84855964779&doi=10.1109%2fISIEA.2011.6108752&partnerID=40&md5=135a214b54fb2226fdcc04679606be7e

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