Effect of deposition time SnO 2 thin film deposited using thermal CVD for humidity sensor application
The effect of SnO 2 thin film thickness as humidity sensor application has been investigated. In this paper, Humidity sensitivity of SnO 2 thin film at different thickness deposited by thermal chemical vapor deposition were presented. The electrical, optical and structural properties of SnO 2 thin f...
| Published in: | 2011 IEEE Symposium on Industrial Electronics and Applications, ISIEA 2011 |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2011
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84855964779&doi=10.1109%2fISIEA.2011.6108752&partnerID=40&md5=135a214b54fb2226fdcc04679606be7e |