Effect of oxygen flow rate on the properties of nanocolumnar ZnO thin films prepared using radio frequency magnetron sputtering system for ultraviolet sensor applications

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Effect of oxygen flow rate on the properties of nanocolumnar ZnO thin films prepared using radio frequency magnetron sputtering system for ultraviolet sensor applications

Nanostructured zinc oxide (ZnO) thin films were deposited on glass substrates using radio frequency (RF) magnetron sputtering system at different oxygen flow rates ranges between 0 to 40 sccm. Field emission scanning electron microscopy (FESEM) images was revealed that nanocolumnar ZnO structure thi...

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Bibliographic Details
Published in:	Advanced Materials Research
Main Author:	Mohamad H.M.; Wan S.W.A.; Musa M.Z.; Zuraida K.; Mohd F.M.; Salina M.; Diyana M.S.; Mohamad R.
Format:	Conference paper
Language:	English
Published:	2012
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-81855177339&doi=10.4028%2fwww.scientific.net%2fAMR.364.1&partnerID=40&md5=812187283a2f2a90980a3dddc56fbc28

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