Effect of oxygen flow rate on the properties of nanocolumnar ZnO thin films prepared using radio frequency magnetron sputtering system for ultraviolet sensor applications
Nanostructured zinc oxide (ZnO) thin films were deposited on glass substrates using radio frequency (RF) magnetron sputtering system at different oxygen flow rates ranges between 0 to 40 sccm. Field emission scanning electron microscopy (FESEM) images was revealed that nanocolumnar ZnO structure thi...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2012
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-81855177339&doi=10.4028%2fwww.scientific.net%2fAMR.364.1&partnerID=40&md5=812187283a2f2a90980a3dddc56fbc28 |