Effects of annealing process on dielectric properties of sol-gel derived lead titanate thin films
This paper reports on the effects of annealing process on the dielectric properties of lead titanate (PbTiO3) thin films. The thin films have been deposited on silicon substrates using sol-gel spin coating method. The dielectric properties and resistivity of the thin films annealed at different anne...
| Published in: | International Conference on Electronic Devices, Systems, and Applications |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2011
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-80055096281&doi=10.1109%2fICEDSA.2011.5959086&partnerID=40&md5=b12f26077ee04548b9dcb44ded62490b |