Effect of deposition temperature on the characteristics of Zinc Oxide nanoparticles thin films deposited by thermal chemical vapor deposition
Zinc Oxide (ZnO) thin films were deposited by thermal chemical vapor deposition (TCVD) method using a two furnace system. Sol-gel spin coated ZnO templates were used to enhance the growth of the nanoparticles. The thin films were deposited at 400 ∼ 500°C to study the effect of the deposition tempera...
| Published in: | International Conference on Electronic Devices, Systems, and Applications |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2011
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-80055067448&doi=10.1109%2fICEDSA.2011.5959070&partnerID=40&md5=91f740001c01de1ade46a2a052ebc6fc |