Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing

QR Code

Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing

This paper describes the fabrication process of a piezoresistive microcantilever sensor that is used as a platform for biological sensing such as salivary amylase-activity. The 0.5μm-thick piezoresistive sensors are made on polysilicon-based cantilever beam. This surface micromachined microcantileve...

Full description

Bibliographic Details
Published in:	AIP Conference Proceedings
Main Author:	Madzhi N.K.; Ahmad A.B.; Khuan L.Y.; Rani R.A.; Syono M.I.; Abdullah F.
Format:	Conference paper
Language:	English
Published:	2009
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450280972&doi=10.1063%2f1.3160261&partnerID=40&md5=741de8b962f944a0cc60f05400fa155d

Similar Items

4-(2-(1H-Benzo[d]imidazol-2-ylthio) acetamido)-N-(substituted phenyl)benzamides: Design, synthesis and biological evaluation
by: Tahlan S.; Ramasamy K.; Lim S.M.; Shah S.A.A.; Mani V.; Narasimhan B.
Published: (2019)

Review of environmental monitoring in freshwater lakes using geospatial techniques (remote sensing and GIS)
by: Kamaruzzaman, et al.
Published: (2025)

Review of environmental monitoring in freshwater lakes using geospatial techniques (remote sensing and GIS)
by: Kamaruzzaman K.; Salleh S.A.; Pardi F.; Abdullah M.F.; Foronda V.; Bergonio E.L.; Rahmawaty R.
Published: (2025)

UAV Based Efficient Cooperative Spectrum Sensing in CRN
by: Roslee M.; Sudhamani C.; Ibrahim Mitani S.M.; Osman A.F.; Ali F.Z.; Waseem A.
Published: (2024)

Effects of Infill Density, Wall Perimeter and Layer Height in Fabricating 3D Printing Products
by: Mazlan M.A.; Anas M.A.; Nor Izmin N.A.; Abdullah A.H.
Published: (2023)

Fabrication, characteristics, and applications of boron nitride and their composite nanomaterials
by: Hayat A.; Sohail M.; Hamdy M.S.; Taha T.A.; AlSalem H.S.; Alenad A.M.; Amin M.A.; Shah R.; Palamanit A.; Khan J.; Nawawi W.I.; Mane S.K.B.
Published: (2022)

Synthesis and Biological Evaluation of Coumarin Bearing Thiourea Derivative as Potential Antibacterial Agent
by: Alsukor, et al.
Published: (2024)

Thermoregulatory Comfort Properties of Sports Jersey Fabric: A Review
by: Suhaimi S.A.; Ruznan W.S.; Hussain R.N.J.R.; Nor M.A.M.; Ahmad M.R.
Published: (2025)

Fabrication of unfired bricks from industrial scheduled waste (WWTs)
by: Othman U.M.; Rahmat M.N.
Published: (2016)

The effect of deposition time on the morphology of CuS electrodes fabricated by chemical bath deposition for supercapacitor applications
by: Abdullah H.; Sundararaj M.; Selvanathan V.; Naim N.M.; Akhtaruzzaman M.; Othman M.H.D.; Yap W.F.; Mohmad A.R.; Azman N.J.; Ahmad M.F.; Sampe J.; Yuliarto B.
Published: (2024)

Enhancement of sensing performance for yeast cell using tapered optical fibre
by: Burham N.; Bachok N.N.; Isa N.M.; Arsad N.
Published: (2024)

Bottom of Line Corrosion Mechanism in Marginal Sour Environment Wet Gas Pipelines
by: Azhar L.Y.; Hasnan M.H.; Jarni H.H.; Othman N.K.; Yaakob N.
Published: (2024)

Recent synthetic approaches towards thienothiophenes: a potential template for biologically active compounds
by: Rafiq A.; Aslam S.; Ahmad M.; Nazir M.S.; Farooq A.; Sultan S.
Published: (2024)

Critical physicochemical and biological attributes of nanoemulsions for pulmonary delivery of rifampicin by nebulization technique in tuberculosis treatment
by: Shah K.; Chan L.W.; Wong T.W.
Published: (2017)

Doppler radar-based pothole sensing using spectral features in k-nearest neighbors
by: Asmadi M.A.D.; Zainuddin S.; Nasir H.M.; Isa I.S.M.; Rashid N.E.A.; Pasya I.
Published: (2025)

Characterization of Graphene-based Flexible One- Side-Coil NFC Tag for Temperature Sensing
by: Faudzi N.M.; Razali A.R.; Manaf A.A.; Rahman N.H.A.; Azlan A.A.; Ibrahim A.; Mozi A.M.; Hafiz S.M.; Sulaiman S.; Rashid N.A.
Published: (2024)

Designing islamic microfinance products for islamic banks in Malaysia
by: Hassan S.; Rahman R.A.; Bakar N.A.; Mohd R.; Muhammad A.D.
Published: (2013)

Enhancing 3D Printed Bed-Resting Ankle-Foot Orthosis Design through Topology Optimization
by: Ab Rashid A.M.; Mukhainizam A.H.D.; Rashid H.; Ramlee M.H.; Pangesty A.I.; Abdullah A.H.
Published: (2024)

Synthesis and biological evaluation of novel coumarin derivatives bearing sulfonamide moiety as potent α-glucosidase inhibitors
by: Alsukor A.; Inayatsyah N.A.; Ridhwan M.J.M.; Kasim N.; Imran S.
Published: (2024)

Synthesis and biological evaluation of novel phenanthridinyl piperazine triazoles via click chemistry as anti-proliferative agents
by: Nagesh H.N.; Suresh N.; Prakash G.V.S.B.; Gupta S.; Rao J.V.; Sekhar K.V.G.C.
Published: (2015)

Determination of Design Solutions to Overcome the Daylighting Design Failure Observed in Existing Educational Building
by: Abdullah W.N.H.W.; Tharim A.H.A.; Ismail A.; Ahmad A.C.
Published: (2022)

Pre-dispersive near-infrared light sensing in non-destructively classifying the brix of intact pineapples
by: Chia K.S.; Jam M.N.H.; Gan Z.; Ismail N.
Published: (2020)

FABRICATION AND RULA ANALYSIS OF HAND-ARM REHABILITATION TRAINER FOR CHILDREN SUFFERING FROM CEREBRAL PALSY
by: Mustafa M.R.; Shaipudin M.S.; Kataraki P.S.; Farrahnoor A.
Published: (2024)

The art of inclusivity: how sense of community shapes Muslim journeys across Islamic and non-Islamic destinations
by: Suhartanto, et al.
Published: (2025)

The art of inclusivity: how sense of community shapes Muslim journeys across Islamic and non-Islamic destinations
by: Suhartanto D.; Amalia F.A.; Sumarjan N.; Lu C.Y.; Nova M.
Published: (2025)

Potential applications of remote sensing and Earth observation approaches to monitor mangrove ecosystem services: A review
by: Roslani M.A.; Ismail M.H.; Kamarudin N.
Published: (2024)

Photocatalytic degradation of methyl green dye by nitrogen-doped carbon quantum dots: Optimisation study by Taguchi approach
by: Abd Rani U.; Ng L.Y.; Ng Y.S.; Ng C.Y.; Ong Y.H.; Lim Y.P.
Published: (2022)

Domperidone nanocrystals with boosted oral bioavailability: fabrication, evaluation and molecular insight into the polymer-domperidone nanocrystal interaction
by: Ndlovu S.T.; Ullah N.; Khan S.; Ramharack P.; Soliman M.; de Matas M.; Shahid M.; Sohail M.; Imran M.; Shah S.W.A.; Hussain Z.
Published: (2019)

The study of marigold, cosmos, and butterfly pea color properties on eco printing using cotton, linen, and silk fabrics
by: Zainuddin N.; Rosli N.N.F.; Tulos N.; Zakaria M.H.; Aris A.
Published: (2024)

In vitro screening of rhizobacteria as biological control agents for controlling Thielaviopsis paradoxa a causal pathogen of black rot in MD2 pineapple
by: Mohamad A.; Tahir N.; Wahab M.Z.A.; Othman N.M.I.; Sapak Z.
Published: (2024)

Understanding methodological solution in design situation of novice designer
by: Anwar R.; Abidin S.Z.; Hassan O.H.
Published: (2015)

Mechanical and thermal characterization of resin-infused cotton fabric/epoxy composites: Influence of woven construction parameters and surface treatments
by: Owen M.M.; Wong L.S.; Achukwu E.O.; Romli A.Z.; Shuib S.B.
Published: (2024)

Assessment of Biological Activity, Total Phenolic Content, and Cytotoxicity of Ethyl Acetate Extracts from an Endophytic Fungus, Lasiodiplodia pseudotheobromae IBRL OS-64
by: Jalil M.T.M.; Zakaria N.A.; Yahya M.F.Z.R.; Mohamad S.A.S.; Ibrahim D.
Published: (2025)

Estimating feature extraction changes of Berkelah Forest, Malaysia from multisensor remote sensing data using and object-based technique
by: Rozali S.; Abd Latif Z.; Adnan N.A.; Hussin Y.; Blackburn A.; Pradhan B.
Published: (2022)

Unveiling the importance of controllable growth of c-axis oriented Sn-doped ZnO nanorod arrays: Towards humidity sensing applications
by: Ismail A.S.; Mamat M.H.; Mohamed R.; Embong Z.; Kossar S.
Published: (2025)

Current trend of lattice structures designed and analysis for porous hip implants: A short review
by: Abdullah N.N.A.A.; Abdullah A.H.; Ramlee M.H.
Published: (2022)

Preliminary Design of Water Intake System for In-situ Water Quality Assessment
by: Robi, et al.
Published: (2024)

Novel Armed Pyrazolobenzothiazine Derivatives: Synthesis, X-Ray Crystal Structure and POM analyses of Biological Activity Against Drug Resistant Clinical Isolate of Staphylococcus aureus
by: Sajid Z.; Ahmad M.; Aslam S.; Ashfaq U.A.; Zahoor A.F.; Saddique F.A.; Parvez M.; Hameed A.; Sultan S.; Zgou H.; Hadda T.B.
Published: (2016)

Comparative study of biological activities of extracts from three Malaysian beilschmiedia species; [Malezya’da yetişen Beilschmiedia türlerinden hazırlanan üç ekstrenin biyolojik etkilerinin karşılaştırılması]
by: Salleh W.M.N.H.W.; Ahmad F.; Khong H.Y.; Zulkifli R.M.
Published: (2016)

Fabrication of glutaraldehyde crosslinked chitosan/algae biomaterial via hydrothermal process: Statistical optimization and adsorption mechanism for MV 2B dye removal
by: Agha, et al.
Published: (2025)