Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing
This paper describes the fabrication process of a piezoresistive microcantilever sensor that is used as a platform for biological sensing such as salivary amylase-activity. The 0.5μm-thick piezoresistive sensors are made on polysilicon-based cantilever beam. This surface micromachined microcantileve...
| Published in: | AIP Conference Proceedings |
|---|---|
| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2009
|
| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450280972&doi=10.1063%2f1.3160261&partnerID=40&md5=741de8b962f944a0cc60f05400fa155d |