Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing

Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing

This paper describes the fabrication process of a piezoresistive microcantilever sensor that is used as a platform for biological sensing such as salivary amylase-activity. The 0.5μm-thick piezoresistive sensors are made on polysilicon-based cantilever beam. This surface micromachined microcantileve...

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Published in:AIP Conference Proceedings
Main Author: Madzhi N.K.; Ahmad A.B.; Khuan L.Y.; Rani R.A.; Syono M.I.; Abdullah F.
Format: Conference paper
Language:English
Published: 2009
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450280972&doi=10.1063%2f1.3160261&partnerID=40&md5=741de8b962f944a0cc60f05400fa155d
id 2-s2.0-70450280972
spelling 2-s2.0-70450280972
Madzhi N.K.; Ahmad A.B.; Khuan L.Y.; Rani R.A.; Syono M.I.; Abdullah F.
Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing
2009
AIP Conference Proceedings
1136

10.1063/1.3160261
https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450280972&doi=10.1063%2f1.3160261&partnerID=40&md5=741de8b962f944a0cc60f05400fa155d
This paper describes the fabrication process of a piezoresistive microcantilever sensor that is used as a platform for biological sensing such as salivary amylase-activity. The 0.5μm-thick piezoresistive sensors are made on polysilicon-based cantilever beam. This surface micromachined microcantilever is based on silicon wafers and fabricated using 0.5μm CMOS process technology. The range of microcantilevers is 40-140 μm long, 0.5-1 μm thick, and 40 μm wide. The force sensitivity of implemented sensors ranges from 2-10Pa is corresponding to salivary amylase-activity adsorbed on the piezoresistive microcantilever. © 2009 American Institute of Physics.

15517616
English
Conference paper
author Madzhi N.K.; Ahmad A.B.; Khuan L.Y.; Rani R.A.; Syono M.I.; Abdullah F.
spellingShingle Madzhi N.K.; Ahmad A.B.; Khuan L.Y.; Rani R.A.; Syono M.I.; Abdullah F.
Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing
author_facet Madzhi N.K.; Ahmad A.B.; Khuan L.Y.; Rani R.A.; Syono M.I.; Abdullah F.
author_sort Madzhi N.K.; Ahmad A.B.; Khuan L.Y.; Rani R.A.; Syono M.I.; Abdullah F.
title Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing
title_short Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing
title_full Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing
title_fullStr Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing
title_full_unstemmed Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing
title_sort Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing
publishDate 2009
container_title AIP Conference Proceedings
container_volume 1136
container_issue
doi_str_mv 10.1063/1.3160261
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450280972&doi=10.1063%2f1.3160261&partnerID=40&md5=741de8b962f944a0cc60f05400fa155d
description This paper describes the fabrication process of a piezoresistive microcantilever sensor that is used as a platform for biological sensing such as salivary amylase-activity. The 0.5μm-thick piezoresistive sensors are made on polysilicon-based cantilever beam. This surface micromachined microcantilever is based on silicon wafers and fabricated using 0.5μm CMOS process technology. The range of microcantilevers is 40-140 μm long, 0.5-1 μm thick, and 40 μm wide. The force sensitivity of implemented sensors ranges from 2-10Pa is corresponding to salivary amylase-activity adsorbed on the piezoresistive microcantilever. © 2009 American Institute of Physics.
publisher
issn 15517616
language English
format Conference paper
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record_format scopus
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