Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing

• Published in: AIP Conference Proceedings
• Main Author: Madzhi N.K.; Ahmad A.B.; Khuan L.Y.; Rani R.A.; Syono M.I.; Abdullah F.
• Format: Conference paper
• Language: English
• Published: 2009
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450280972&doi=10.1063%2f1.3160261&partnerID=40&md5=741de8b962f944a0cc60f05400fa155d
• ISSN: 15517616
• DOI: 10.1063/1.3160261

This paper describes the fabrication process of a piezoresistive microcantilever sensor that is used as a platform for biological sensing such as salivary amylase-activity. The 0.5μm-thick piezoresistive sensors are made on polysilicon-based cantilever beam. This surface micromachined microcantilever is based on silicon wafers and fabricated using 0.5μm CMOS process technology. The range of microcantilevers is 40-140 μm long, 0.5-1 μm thick, and 40 μm wide. The force sensitivity of implemented sensors ranges from 2-10Pa is corresponding to salivary amylase-activity adsorbed on the piezoresistive microcantilever. © 2009 American Institute of Physics.