Sol-gel derived bulk acoustic wave devices for cellular communication applications

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Sol-gel derived bulk acoustic wave devices for cellular communication applications

This paper reports recent advances obtained with bulk acoustic wave resonators fabricated using sol-gel thin film transducers. Acoustic resonances in the uhf/lower microwave region have been observed with unloaded Q values of the order of 800-1000. The resonator characteristics were found to be impr...

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Bibliographic Details
Published in:	IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Main Author:	Awang Zaiki; Miles R.E.; Milne S.J.; Tu Y.L.
Format:	Conference paper
Language:	English
Published:	IEEE 1997
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-0030688231&partnerID=40&md5=d462aeec465411ba8ee338279d1c2f2a

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