Sol-gel derived bulk acoustic wave devices for cellular communication applications
This paper reports recent advances obtained with bulk acoustic wave resonators fabricated using sol-gel thin film transducers. Acoustic resonances in the uhf/lower microwave region have been observed with unloaded Q values of the order of 800-1000. The resonator characteristics were found to be impr...
| Published in: | IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
IEEE
1997
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0030688231&partnerID=40&md5=d462aeec465411ba8ee338279d1c2f2a |