Low-Pressure, Thermal Direct Bonding of PMMA-Dry Film Photoresist-PMMA for Microdevice Fabrication

by Yazid, Muhamad Fitri M.; Nawang, Farah M.; Nasir, S. Mohd Firdaus S. A.; Yusof, Azmi M.
Published in INTELLIGENT MANUFACTURING AND MECHATRONICS, SIMM 2023 (2024)