Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films

by Rahman M.A.A.; Goh B.T.; Chiu W.S.; Haw C.Y.; Mahmood M.R.; Khiew P.S.; Rahman S.A.
Published in Vibrational Spectroscopy (2018)