Fabrication of Uniform Aluminium Nitrate Thin Film on 2-inch Silicon Substrate

by Abdullah S.A.B.; Abd Aziz N.S.B.; Mamat M.H.; Azman Z.; Sahari N.; Mohamed A.N.; Wijaya Y.P.; Nayan N.
Published in 2023 IEEE International Conference on Sensors and Nanotechnology, SENNANO 2023 (2023)