EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

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EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Titanium dioxide (TiO2) thin films were sputtered by radio frequency (RF) magnetron sputtering method and have been employed as the sensing membrane of an extended gate field effect transistor (EGFET) for pH sensing detection application. The TiO2 thin films were deposited onto indium tin oxide (ITO...

書目詳細資料
發表在:	Journal of Sensors
主要作者:	2-s2.0-84984852141
格式:	Article
語言:	English
出版:	Hindawi Limited 2016
在線閱讀:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84984852141&doi=10.1155%2f2016%2f7594531&partnerID=40&md5=8d48b5c22adecd43a1fc00342241f26d

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