EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

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EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Titanium dioxide (TiO2) thin films were sputtered by radio frequency (RF) magnetron sputtering method and have been employed as the sensing membrane of an extended gate field effect transistor (EGFET) for pH sensing detection application. The TiO2 thin films were deposited onto indium tin oxide (ITO...

書誌詳細
出版年:	Journal of Sensors
第一著者:	2-s2.0-84984852141
フォーマット:	論文
言語:	English
出版事項:	Hindawi Limited 2016
オンライン･アクセス:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84984852141&doi=10.1155%2f2016%2f7594531&partnerID=40&md5=8d48b5c22adecd43a1fc00342241f26d

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