EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

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EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Titanium dioxide (TiO2) thin films were sputtered by radio frequency (RF) magnetron sputtering method and have been employed as the sensing membrane of an extended gate field effect transistor (EGFET) for pH sensing detection application. The TiO2 thin films were deposited onto indium tin oxide (ITO...

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Bibliographic Details
Published in:	Journal of Sensors
Main Author:	2-s2.0-84984852141
Format:	Article
Language:	English
Published:	Hindawi Limited 2016
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84984852141&doi=10.1155%2f2016%2f7594531&partnerID=40&md5=8d48b5c22adecd43a1fc00342241f26d

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