EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

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EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Titanium dioxide (TiO2) thin films were sputtered by radio frequency (RF) magnetron sputtering method and have been employed as the sensing membrane of an extended gate field effect transistor (EGFET) for pH sensing detection application. The TiO2 thin films were deposited onto indium tin oxide (ITO...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:	Journal of Sensors
المؤلف الرئيسي:	2-s2.0-84984852141
التنسيق:	مقال
اللغة:	English
منشور في:	Hindawi Limited 2016
الوصول للمادة أونلاين:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84984852141&doi=10.1155%2f2016%2f7594531&partnerID=40&md5=8d48b5c22adecd43a1fc00342241f26d

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