Sensitivity Study of Spin-Coated Metal Oxides Thin Films for Extended Gate Field-Effect Transistor (EGFET) pH Sensor

Increasing demand for accurate, reliable and highly sensitive pH sensors has led researchers to explore various materials for this reason. Metal oxide (MOx) pH sensors have received considerable attention due to their high degree of accuracy and great sensitivity to hydrogen ions. Additionally, this...

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Published in:TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS
Main Authors: Kamarozaman, Nur Syahirah; Zainal, Nurbaya; Zulkefle, Muhammad Alhadi; Rahman, Rohanieza Abdul; Rosli, Aimi Bazilah; Herman, Sukreen Hana; Zulkifli, Zurita
Format: Article; Early Access
Language:English
Published: SPRINGER 2024
Subjects:
Online Access:https://www-webofscience-com.uitm.idm.oclc.org/wos/woscc/full-record/WOS:001174692700001
author Kamarozaman
Nur Syahirah; Zainal
Nurbaya; Zulkefle
Muhammad Alhadi; Rahman
Rohanieza Abdul; Rosli
Aimi Bazilah; Herman
Sukreen Hana; Zulkifli
Zurita
spellingShingle Kamarozaman
Nur Syahirah; Zainal
Nurbaya; Zulkefle
Muhammad Alhadi; Rahman
Rohanieza Abdul; Rosli
Aimi Bazilah; Herman
Sukreen Hana; Zulkifli
Zurita
Sensitivity Study of Spin-Coated Metal Oxides Thin Films for Extended Gate Field-Effect Transistor (EGFET) pH Sensor
Materials Science
author_facet Kamarozaman
Nur Syahirah; Zainal
Nurbaya; Zulkefle
Muhammad Alhadi; Rahman
Rohanieza Abdul; Rosli
Aimi Bazilah; Herman
Sukreen Hana; Zulkifli
Zurita
author_sort Kamarozaman
spelling Kamarozaman, Nur Syahirah; Zainal, Nurbaya; Zulkefle, Muhammad Alhadi; Rahman, Rohanieza Abdul; Rosli, Aimi Bazilah; Herman, Sukreen Hana; Zulkifli, Zurita
Sensitivity Study of Spin-Coated Metal Oxides Thin Films for Extended Gate Field-Effect Transistor (EGFET) pH Sensor
TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS
English
Article; Early Access
Increasing demand for accurate, reliable and highly sensitive pH sensors has led researchers to explore various materials for this reason. Metal oxide (MOx) pH sensors have received considerable attention due to their high degree of accuracy and great sensitivity to hydrogen ions. Additionally, this MOx pH sensor overcomes the shortcomings of the glass electrode. Thus, a comparative experimental study on various metal oxides (MOx) of TiO2, ZnO, CuO, and NiO thin films as sensing electrodes for extended-gate field effect transistor (EGFET)-pH sensor was carried out via a facile sol-gel spin-coating method. Here, the thin films were tested as pH sensors in pH 2, 4, 7, 10 and 12 and hysteresis stability for 25 min in pH 7 -> 4 -> 7 -> 10 -> 7. The pH measurements were repeated several times to confirm the sensitivity behaviour. The surface morphology and surface roughness of the films were characterized using field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM), respectively. The TiO2 thin films showed the highest sensitivity (53.4 mV/pH, R2 = 0.992) and lowest hysteresis value (1 mV) compared to the other sensing electrodes. Moreover, the thin film showed drift rates of 6.74, 3.52 and 41.18 mV/h for pH 10, 7 and 4. The experimental findings suggested that both surface morphology and surface roughness affect the sensitivity performance of these devices since a smooth surface morphology and low roughness value were observed for TiO2 thin films. Besides, the basic mechanism of MOx pH sensor was presented in this study.
SPRINGER
1229-7607
2092-7592
2024


10.1007/s42341-024-00522-7
Materials Science

WOS:001174692700001
https://www-webofscience-com.uitm.idm.oclc.org/wos/woscc/full-record/WOS:001174692700001
title Sensitivity Study of Spin-Coated Metal Oxides Thin Films for Extended Gate Field-Effect Transistor (EGFET) pH Sensor
title_short Sensitivity Study of Spin-Coated Metal Oxides Thin Films for Extended Gate Field-Effect Transistor (EGFET) pH Sensor
title_full Sensitivity Study of Spin-Coated Metal Oxides Thin Films for Extended Gate Field-Effect Transistor (EGFET) pH Sensor
title_fullStr Sensitivity Study of Spin-Coated Metal Oxides Thin Films for Extended Gate Field-Effect Transistor (EGFET) pH Sensor
title_full_unstemmed Sensitivity Study of Spin-Coated Metal Oxides Thin Films for Extended Gate Field-Effect Transistor (EGFET) pH Sensor
title_sort Sensitivity Study of Spin-Coated Metal Oxides Thin Films for Extended Gate Field-Effect Transistor (EGFET) pH Sensor
container_title TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS
language English
format Article; Early Access
description Increasing demand for accurate, reliable and highly sensitive pH sensors has led researchers to explore various materials for this reason. Metal oxide (MOx) pH sensors have received considerable attention due to their high degree of accuracy and great sensitivity to hydrogen ions. Additionally, this MOx pH sensor overcomes the shortcomings of the glass electrode. Thus, a comparative experimental study on various metal oxides (MOx) of TiO2, ZnO, CuO, and NiO thin films as sensing electrodes for extended-gate field effect transistor (EGFET)-pH sensor was carried out via a facile sol-gel spin-coating method. Here, the thin films were tested as pH sensors in pH 2, 4, 7, 10 and 12 and hysteresis stability for 25 min in pH 7 -> 4 -> 7 -> 10 -> 7. The pH measurements were repeated several times to confirm the sensitivity behaviour. The surface morphology and surface roughness of the films were characterized using field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM), respectively. The TiO2 thin films showed the highest sensitivity (53.4 mV/pH, R2 = 0.992) and lowest hysteresis value (1 mV) compared to the other sensing electrodes. Moreover, the thin film showed drift rates of 6.74, 3.52 and 41.18 mV/h for pH 10, 7 and 4. The experimental findings suggested that both surface morphology and surface roughness affect the sensitivity performance of these devices since a smooth surface morphology and low roughness value were observed for TiO2 thin films. Besides, the basic mechanism of MOx pH sensor was presented in this study.
publisher SPRINGER
issn 1229-7607
2092-7592
publishDate 2024
container_volume
container_issue
doi_str_mv 10.1007/s42341-024-00522-7
topic Materials Science
topic_facet Materials Science
accesstype
id WOS:001174692700001
url https://www-webofscience-com.uitm.idm.oclc.org/wos/woscc/full-record/WOS:001174692700001
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collection Web of Science (WoS)
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