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Mesh grid of SILVACO TCAD effect on net doping profile for NMOS structures

Process of developing the NMOS structure is performed in 2D SILVACO Athena and Atlas Simulation. The NMOS fabrication process steps were chosen from reference [4]. Mesh grid effect on net doping profile was obtained by varying the grid. Variation of grid was determined through observation between fi...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:	AIP Conference Proceedings
المؤلف الرئيسي:	2-s2.0-70450286458
التنسيق:	Conference paper
اللغة:	English
منشور في:	2009
الوصول للمادة أونلاين:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450286458&doi=10.1063%2f1.3160211&partnerID=40&md5=bb28df01dd6241325f13a5bc5f696a1e

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