APA (7th ed.) Citation

2-s2.0-70450280972. (2009). Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing. AIP Conference Proceedings, 1136, . https://doi.org/10.1063/1.3160261

Chicago Style (17th ed.) Citation

2-s2.0-70450280972. "Design and Fabrication of Polysilicon-based Piezoresistive Microcantilever for Biological Sensing." AIP Conference Proceedings 1136 (2009). https://doi.org/10.1063/1.3160261.

MLA (8th ed.) Citation

2-s2.0-70450280972. "Design and Fabrication of Polysilicon-based Piezoresistive Microcantilever for Biological Sensing." AIP Conference Proceedings, vol. 1136, 2009, https://doi.org/10.1063/1.3160261.