Tailoring Ga-Doped ZnO Thin Film Properties for Enhanced Optoelectric Device Performance: Argon Flow Rate Modulation and Dynamic Sputtering Geometry Analysis
The impact of dynamic sputtering geometry on the properties of ZnO: Ga (GZO) thin film nanomaterials is investigated by systematically varying Ar flow rates and substrate positions during the film growth. The structural, optical, and electrical characteristics of GZO layers, deposited from a ZnO: Ga...
| Published in: | Solar RRL |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
John Wiley and Sons Inc
2024
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85212250368&doi=10.1002%2fsolr.202400353&partnerID=40&md5=9055ab350e6cf74f1154892607f2b0a2 |