Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor

Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor

Optimal pH levels play a critical part in an extensive diversity of industries, including pharmaceuticals, food processing, agriculture, and chemistry. Electrochemical sensors, for example, extended gate field effect transistors (EGFET) and ion-sensitive field effect transistors (ISFET), are commonl...

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Published in:2024 IEEE International Conference on Applied Electronics and Engineering, ICAEE 2024
Main Author: Mahzan N.H.; Mohamad A.A.; Hashim S.B.; Zulkifli Z.; Alip R.I.; Herman S.H.
Format: Conference paper
Language:English
Published: Institute of Electrical and Electronics Engineers Inc. 2024
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85204808042&doi=10.1109%2fICAEE62924.2024.10667580&partnerID=40&md5=468720e83c9a9d32708c432238866d08
id 2-s2.0-85204808042
spelling 2-s2.0-85204808042
Mahzan N.H.; Mohamad A.A.; Hashim S.B.; Zulkifli Z.; Alip R.I.; Herman S.H.
Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor
2024
2024 IEEE International Conference on Applied Electronics and Engineering, ICAEE 2024


10.1109/ICAEE62924.2024.10667580
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85204808042&doi=10.1109%2fICAEE62924.2024.10667580&partnerID=40&md5=468720e83c9a9d32708c432238866d08
Optimal pH levels play a critical part in an extensive diversity of industries, including pharmaceuticals, food processing, agriculture, and chemistry. Electrochemical sensors, for example, extended gate field effect transistors (EGFET) and ion-sensitive field effect transistors (ISFET), are commonly employed for accurate pH measurement. This article explores the performance of ZnO-based EGFET pH sensors, highlighting the material's remarkable sensitivity and wide range of nanostructures. Thin films of ZnO were applied onto flexible substrates using spin coating and then subjected to annealing at temperatures varying from room temperature (RT) to 100 °C. This study investigates the effects of different post-deposition heat treatments on sensor performance, offering helpful information into enhancing the precision and consistency of EGFET-based pH sensors. © 2024 IEEE.
Institute of Electrical and Electronics Engineers Inc.

English
Conference paper
author Mahzan N.H.; Mohamad A.A.; Hashim S.B.; Zulkifli Z.; Alip R.I.; Herman S.H.
spellingShingle Mahzan N.H.; Mohamad A.A.; Hashim S.B.; Zulkifli Z.; Alip R.I.; Herman S.H.
Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor
author_facet Mahzan N.H.; Mohamad A.A.; Hashim S.B.; Zulkifli Z.; Alip R.I.; Herman S.H.
author_sort Mahzan N.H.; Mohamad A.A.; Hashim S.B.; Zulkifli Z.; Alip R.I.; Herman S.H.
title Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor
title_short Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor
title_full Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor
title_fullStr Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor
title_full_unstemmed Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor
title_sort Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor
publishDate 2024
container_title 2024 IEEE International Conference on Applied Electronics and Engineering, ICAEE 2024
container_volume
container_issue
doi_str_mv 10.1109/ICAEE62924.2024.10667580
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85204808042&doi=10.1109%2fICAEE62924.2024.10667580&partnerID=40&md5=468720e83c9a9d32708c432238866d08
description Optimal pH levels play a critical part in an extensive diversity of industries, including pharmaceuticals, food processing, agriculture, and chemistry. Electrochemical sensors, for example, extended gate field effect transistors (EGFET) and ion-sensitive field effect transistors (ISFET), are commonly employed for accurate pH measurement. This article explores the performance of ZnO-based EGFET pH sensors, highlighting the material's remarkable sensitivity and wide range of nanostructures. Thin films of ZnO were applied onto flexible substrates using spin coating and then subjected to annealing at temperatures varying from room temperature (RT) to 100 °C. This study investigates the effects of different post-deposition heat treatments on sensor performance, offering helpful information into enhancing the precision and consistency of EGFET-based pH sensors. © 2024 IEEE.
publisher Institute of Electrical and Electronics Engineers Inc.
issn
language English
format Conference paper
accesstype
record_format scopus
collection Scopus
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