Effect of Low-Temperature Deposition on pH Sensing Performance with Zinc Oxide-based Extended-gate Field Effect Transistor
Optimal pH levels play a critical part in an extensive diversity of industries, including pharmaceuticals, food processing, agriculture, and chemistry. Electrochemical sensors, for example, extended gate field effect transistors (EGFET) and ion-sensitive field effect transistors (ISFET), are commonl...
| Published in: | 2024 IEEE International Conference on Applied Electronics and Engineering, ICAEE 2024 |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2024
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85204808042&doi=10.1109%2fICAEE62924.2024.10667580&partnerID=40&md5=468720e83c9a9d32708c432238866d08 |
| Summary: | Optimal pH levels play a critical part in an extensive diversity of industries, including pharmaceuticals, food processing, agriculture, and chemistry. Electrochemical sensors, for example, extended gate field effect transistors (EGFET) and ion-sensitive field effect transistors (ISFET), are commonly employed for accurate pH measurement. This article explores the performance of ZnO-based EGFET pH sensors, highlighting the material's remarkable sensitivity and wide range of nanostructures. Thin films of ZnO were applied onto flexible substrates using spin coating and then subjected to annealing at temperatures varying from room temperature (RT) to 100 °C. This study investigates the effects of different post-deposition heat treatments on sensor performance, offering helpful information into enhancing the precision and consistency of EGFET-based pH sensors. © 2024 IEEE. |
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| ISSN: | |
| DOI: | 10.1109/ICAEE62924.2024.10667580 |