Anodized porous silicon based humidity sensor: evaluation of material characteristics and sensor performance of AU/PSIO2/AU

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Anodized porous silicon based humidity sensor: evaluation of material characteristics and sensor performance of AU/PSIO2/AU

Porous silicon (PSi) has received a lot of attention in nanotechnology research in recent years for its potential use as sensing layers in sensor application. However, there have been relatively limited studies concerning the effect of varying contact gaps and bias voltages on the humidity sensor ba...

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Bibliographic Details
Published in:	Journal of Porous Materials
Main Author:	Wan Ahmad Aziz W.N.S.; Abdul Rani R.; Ngadiman N.L.S.; Ismail M.F.; Zoolfakar A.S.
Format:	Article
Language:	English
Published:	Springer 2024
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85189784154&doi=10.1007%2fs10934-024-01610-y&partnerID=40&md5=8b7a83f603aab87c2616fe63a4ca3fd5

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