Fabrication of Uniform Aluminium Nitrate Thin Film on 2-inch Silicon Substrate
Aluminium nitrate (AlN) has attracted numerous interests among researchers due to its unique properties in the semiconductor material and other high-performance devices. Investigating the uniformity of AlN thin film is one of the most challenge tasks. In this study, AlN thin films successfully depos...
| Published in: | 2023 IEEE International Conference on Sensors and Nanotechnology, SENNANO 2023 |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2023
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85182744279&doi=10.1109%2fSENNANO57767.2023.10352573&partnerID=40&md5=6621bc0eeeb115a413f2f50358f5a0d7 |