Fabrication of Uniform Aluminium Nitrate Thin Film on 2-inch Silicon Substrate

Fabrication of Uniform Aluminium Nitrate Thin Film on 2-inch Silicon Substrate

Aluminium nitrate (AlN) has attracted numerous interests among researchers due to its unique properties in the semiconductor material and other high-performance devices. Investigating the uniformity of AlN thin film is one of the most challenge tasks. In this study, AlN thin films successfully depos...

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Bibliographic Details
Published in:2023 IEEE International Conference on Sensors and Nanotechnology, SENNANO 2023
Main Author: Abdullah S.A.B.; Abd Aziz N.S.B.; Mamat M.H.; Azman Z.; Sahari N.; Mohamed A.N.; Wijaya Y.P.; Nayan N.
Format: Conference paper
Language:English
Published: Institute of Electrical and Electronics Engineers Inc. 2023
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85182744279&doi=10.1109%2fSENNANO57767.2023.10352573&partnerID=40&md5=6621bc0eeeb115a413f2f50358f5a0d7

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-85182744279&doi=10.1109%2fSENNANO57767.2023.10352573&partnerID=40&md5=6621bc0eeeb115a413f2f50358f5a0d7

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