Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode

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Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode

Zinc oxide-based composite films extended gate field effect transistor (EGFET) sensing electrode were fabricated on indium tin oxide, ITO substrate using spin coating method. The sensing performance and structural properties of two different structure sensing electrode; bilayer films and composite f...

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Bibliographic Details
Published in:	Proceedings - 2023 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2023
Main Author:	Zainal N.; Rahman A.; Kamarozaman N.S.; Zulkifli Z.; Herman S.H.
Format:	Conference paper
Language:	English
Published:	Institute of Electrical and Electronics Engineers Inc. 2023
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85179850317&doi=10.1109%2fRSM59033.2023.10327090&partnerID=40&md5=f9d09e1fe8a23a8bf1d5cb576bee0080

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