Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode
Zinc oxide-based composite films extended gate field effect transistor (EGFET) sensing electrode were fabricated on indium tin oxide, ITO substrate using spin coating method. The sensing performance and structural properties of two different structure sensing electrode; bilayer films and composite f...
| Published in: | Proceedings - 2023 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2023 |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2023
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85179850317&doi=10.1109%2fRSM59033.2023.10327090&partnerID=40&md5=f9d09e1fe8a23a8bf1d5cb576bee0080 |