Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode

Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode

Zinc oxide-based composite films extended gate field effect transistor (EGFET) sensing electrode were fabricated on indium tin oxide, ITO substrate using spin coating method. The sensing performance and structural properties of two different structure sensing electrode; bilayer films and composite f...

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Published in:Proceedings - 2023 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2023
Main Author: Zainal N.; Rahman A.; Kamarozaman N.S.; Zulkifli Z.; Herman S.H.
Format: Conference paper
Language:English
Published: Institute of Electrical and Electronics Engineers Inc. 2023
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85179850317&doi=10.1109%2fRSM59033.2023.10327090&partnerID=40&md5=f9d09e1fe8a23a8bf1d5cb576bee0080
id 2-s2.0-85179850317
spelling 2-s2.0-85179850317
Zainal N.; Rahman A.; Kamarozaman N.S.; Zulkifli Z.; Herman S.H.
Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode
2023
Proceedings - 2023 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2023


10.1109/RSM59033.2023.10327090
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85179850317&doi=10.1109%2fRSM59033.2023.10327090&partnerID=40&md5=f9d09e1fe8a23a8bf1d5cb576bee0080
Zinc oxide-based composite films extended gate field effect transistor (EGFET) sensing electrode were fabricated on indium tin oxide, ITO substrate using spin coating method. The sensing performance and structural properties of two different structure sensing electrode; bilayer films and composite films were highlighted in this study. The sensitiveness of the sensing electrode was investigated towards different pH buffer solutions within range pH2 to pH12 and semiconductor measuring unit. Here, commercial reference electrode (RE) was used to complete the electrochemical measurement. As a result, the pH sensitivity and linearity value of the bilayer composite was found highest in this study, that is 45.4 mV/pH and 0.9864 respectively. The results can be observed as correlated with the physical properties of the sensing electrodes characterized by field emission scanning electron microscopy and contact angle. © 2023 IEEE.
Institute of Electrical and Electronics Engineers Inc.

English
Conference paper
author Zainal N.; Rahman A.; Kamarozaman N.S.; Zulkifli Z.; Herman S.H.
spellingShingle Zainal N.; Rahman A.; Kamarozaman N.S.; Zulkifli Z.; Herman S.H.
Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode
author_facet Zainal N.; Rahman A.; Kamarozaman N.S.; Zulkifli Z.; Herman S.H.
author_sort Zainal N.; Rahman A.; Kamarozaman N.S.; Zulkifli Z.; Herman S.H.
title Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode
title_short Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode
title_full Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode
title_fullStr Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode
title_full_unstemmed Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode
title_sort Electrochemical EGFET pH Sensing Performance using ZnO-based Composite Thin Films Sensing Electrode
publishDate 2023
container_title Proceedings - 2023 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2023
container_volume
container_issue
doi_str_mv 10.1109/RSM59033.2023.10327090
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85179850317&doi=10.1109%2fRSM59033.2023.10327090&partnerID=40&md5=f9d09e1fe8a23a8bf1d5cb576bee0080
description Zinc oxide-based composite films extended gate field effect transistor (EGFET) sensing electrode were fabricated on indium tin oxide, ITO substrate using spin coating method. The sensing performance and structural properties of two different structure sensing electrode; bilayer films and composite films were highlighted in this study. The sensitiveness of the sensing electrode was investigated towards different pH buffer solutions within range pH2 to pH12 and semiconductor measuring unit. Here, commercial reference electrode (RE) was used to complete the electrochemical measurement. As a result, the pH sensitivity and linearity value of the bilayer composite was found highest in this study, that is 45.4 mV/pH and 0.9864 respectively. The results can be observed as correlated with the physical properties of the sensing electrodes characterized by field emission scanning electron microscopy and contact angle. © 2023 IEEE.
publisher Institute of Electrical and Electronics Engineers Inc.
issn
language English
format Conference paper
accesstype
record_format scopus
collection Scopus
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