Study on particle size and field effect with sp2/sp3 ratio of hydrogenated diamond-like carbon
Hydrogenated diamond-like carbon (HDLC) films were synthesized through a reactive gas-plasma process employing methane (CH4) and hydrogen (H2) as precursor gases on a silicon (100) wafer substrate, conducted at room temperature. The deposition process utilized a biased enhanced nucleation technique,...
| Published in: | Nanomaterials and Energy |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
ICE Publishing
2023
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85178249303&doi=10.1680%2fjnaen.23.00065&partnerID=40&md5=c87aa8de522d083090bb55ece91ed090 |