Optical band gap and surface morphology of AlN thin-film sputtered by HiPIMS on glass substrate

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Optical band gap and surface morphology of AlN thin-film sputtered by HiPIMS on glass substrate

Aluminium Nitride (AlN) thin-film on glass substrate were prepared by HiPIMS at different Ar to N2 ratio. The XRD pattern revealed the amorphous structure of AlN as compared to AlN on Si substrate. The optical band gap of AlN on glass derived from Tauc plot shows the optical band gap was inversely p...

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Bibliographic Details
Published in:	AIP Conference Proceedings
Main Author:	Azman Z.; Nayan N.; Othman N.A.; Bakar A.S.A.; Mamat M.H.; Yusop M.Z.M.; Ahmad M.Y.
Format:	Conference paper
Language:	English
Published:	American Institute of Physics Inc. 2023
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85178061668&doi=10.1063%2f5.0124192&partnerID=40&md5=ed677b59558e4920144f03f3c5d914b3

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