Summary: | We propose the utilization of inorganic crystals as substrates for kinetic inductance detectors (KIDs), which are thin-film superconducting resonators, for future rare event studies. When energy is deposited on the substrate, phonons are generated and propagate from the substrate to the surface, where KIDs are fabricated. This approach expands the potential for utilizing a diverse range of target crystals. We implement KIDs on calcium fluoride (CaF2) substrates, since 19F is sensitive to dark matter with spin-dependent interaction and 48Ca is one of the double-β decay nuclei. We have experimentally demonstrated the operation of the KIDs on the CaF2 substrate and their phonon-mediated particle detection. © 2023 The Author(s). Published by Oxford University Press on behalf of the Physical Society of Japan.
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