Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer

This paper investigates performance of ZnO/SnO2 nanorods structure thin film deposited at two different ZnO seed layer (ZnO seed A and ZnO seed B) for humidity sensor application. ZnO seed A and ZnO seed B were deposited using two different method which were sputtering method and spin coating method...

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Published in:Solid State Phenomena
Main Author: Md Sin N.D.; Md Said Ahmad S.; Syakirin Ismail A.; Hafiz Mamat M.; Hussin M.Z.; Zahid F.S.; Asnida Asli N.; Abdullah M.H.; Rusop M.
Format: Book chapter
Language:English
Published: Trans Tech Publications Ltd 2023
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85161711310&doi=10.4028%2fp-o0065m&partnerID=40&md5=ad29ea719bf27f9341a477126709c991
id 2-s2.0-85161711310
spelling 2-s2.0-85161711310
Md Sin N.D.; Md Said Ahmad S.; Syakirin Ismail A.; Hafiz Mamat M.; Hussin M.Z.; Zahid F.S.; Asnida Asli N.; Abdullah M.H.; Rusop M.
Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer
2023
Solid State Phenomena
343

10.4028/p-o0065m
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85161711310&doi=10.4028%2fp-o0065m&partnerID=40&md5=ad29ea719bf27f9341a477126709c991
This paper investigates performance of ZnO/SnO2 nanorods structure thin film deposited at two different ZnO seed layer (ZnO seed A and ZnO seed B) for humidity sensor application. ZnO seed A and ZnO seed B were deposited using two different method which were sputtering method and spin coating method respectively. ZnO/SnO2 nanorods structure thin film that has been prepared on ZnO seed A and ZnO seed B using thermal chemical vapor deposition (CVD). The structural properties have been characterized using field emission scanning electron microscopy (FESEM) (JEOL JSM 6701F). Base on the FESEM image the size of ZnO seed A and ZnO seed B were ranging around 75 to 85 nm and 17 to 21 nm respectively. The results analyzed were for ZnO/SnO2 composite nanorods structure size on ZnO seed A and ZnO seed B were averagely around 18 nm to 29 nm. The sensor properties were characterized by using current-voltage (I-V) measurement (Keithley 2400). ZnO/SnO2 nanorods structure thin film deposited on ZnO Seed A performed highest sensitivity with 265 ratio compare to ZnO/SnO2 nanorods structure thin film deposited on ZnO Seed B with 75 ratio of sensitivity. © 2023 Trans Tech Publications Ltd, Switzerland.
Trans Tech Publications Ltd
10120394
English
Book chapter

author Md Sin N.D.; Md Said Ahmad S.; Syakirin Ismail A.; Hafiz Mamat M.; Hussin M.Z.; Zahid F.S.; Asnida Asli N.; Abdullah M.H.; Rusop M.
spellingShingle Md Sin N.D.; Md Said Ahmad S.; Syakirin Ismail A.; Hafiz Mamat M.; Hussin M.Z.; Zahid F.S.; Asnida Asli N.; Abdullah M.H.; Rusop M.
Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer
author_facet Md Sin N.D.; Md Said Ahmad S.; Syakirin Ismail A.; Hafiz Mamat M.; Hussin M.Z.; Zahid F.S.; Asnida Asli N.; Abdullah M.H.; Rusop M.
author_sort Md Sin N.D.; Md Said Ahmad S.; Syakirin Ismail A.; Hafiz Mamat M.; Hussin M.Z.; Zahid F.S.; Asnida Asli N.; Abdullah M.H.; Rusop M.
title Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer
title_short Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer
title_full Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer
title_fullStr Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer
title_full_unstemmed Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer
title_sort Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer
publishDate 2023
container_title Solid State Phenomena
container_volume 343
container_issue
doi_str_mv 10.4028/p-o0065m
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85161711310&doi=10.4028%2fp-o0065m&partnerID=40&md5=ad29ea719bf27f9341a477126709c991
description This paper investigates performance of ZnO/SnO2 nanorods structure thin film deposited at two different ZnO seed layer (ZnO seed A and ZnO seed B) for humidity sensor application. ZnO seed A and ZnO seed B were deposited using two different method which were sputtering method and spin coating method respectively. ZnO/SnO2 nanorods structure thin film that has been prepared on ZnO seed A and ZnO seed B using thermal chemical vapor deposition (CVD). The structural properties have been characterized using field emission scanning electron microscopy (FESEM) (JEOL JSM 6701F). Base on the FESEM image the size of ZnO seed A and ZnO seed B were ranging around 75 to 85 nm and 17 to 21 nm respectively. The results analyzed were for ZnO/SnO2 composite nanorods structure size on ZnO seed A and ZnO seed B were averagely around 18 nm to 29 nm. The sensor properties were characterized by using current-voltage (I-V) measurement (Keithley 2400). ZnO/SnO2 nanorods structure thin film deposited on ZnO Seed A performed highest sensitivity with 265 ratio compare to ZnO/SnO2 nanorods structure thin film deposited on ZnO Seed B with 75 ratio of sensitivity. © 2023 Trans Tech Publications Ltd, Switzerland.
publisher Trans Tech Publications Ltd
issn 10120394
language English
format Book chapter
accesstype
record_format scopus
collection Scopus
_version_ 1818940558940307456