Evaluation on the egfet ph sensing performance of sol-gel spin coated titanium dioxide thin film

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Evaluation on the egfet ph sensing performance of sol-gel spin coated titanium dioxide thin film

For this study, TiO2 thin film was fabricated using sol-gel spin coating method. The fabricated film was then applied as sensing membrane in an extended gate field effect transistor (EGFET) pH sensor system. The pH sensing performance of the sol-gel spin coated TiO2 were evaluated in terms of sensit...

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Bibliographic Details
Published in:	Jurnal Teknologi
Main Author:	Al Hadi Zulkefle M.; Herman S.H.; Rahman R.A.; Yusof K.A.; Rosli A.B.; Hanim Abdullah W.F.; Zulkifli Z.
Format:	Article
Language:	English
Published:	Penerbit UTM Press 2021
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85110057040&doi=10.11113%2fjurnalteknologi.v83.16313&partnerID=40&md5=7930a8c0fbe56cbc126dcc97e9c786bf

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