Implementation of capacitance as simultaneous sensing and actuating tool in tapered microelectrode arrays for dielectrophoresis-on-a-chip application

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Implementation of capacitance as simultaneous sensing and actuating tool in tapered microelectrode arrays for dielectrophoresis-on-a-chip application

Purpose: This paper aims to present the capacitance characterization of tapered dielectrophoresis (DEP) microelectrodes as micro-electro-mechanical system sensor and actuator device. The application of DEP-on-a-chip (DOC) can be used to evaluate and correlate the capacitive sensing measurement at an...

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Bibliographic Details
Published in:	Microelectronics International
Main Author:	Buyong M.R.; Larki F.; Hakimi Zainal M.I.; Almahi A.Y.A.; Ismail A.G.; Hamzah A.A.; Kayani A.A.K.; Caille C.E.; Yeop Majlis B.
Format:	Article
Language:	English
Published:	Emerald Group Holdings Ltd. 2020
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85091315300&doi=10.1108%2fMI-04-2020-0023&partnerID=40&md5=fcb12da9dd8676801e336a136810c42f

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