Implementation of capacitance as simultaneous sensing and actuating tool in tapered microelectrode arrays for dielectrophoresis-on-a-chip application
Purpose: This paper aims to present the capacitance characterization of tapered dielectrophoresis (DEP) microelectrodes as micro-electro-mechanical system sensor and actuator device. The application of DEP-on-a-chip (DOC) can be used to evaluate and correlate the capacitive sensing measurement at an...
| Published in: | Microelectronics International |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Emerald Group Holdings Ltd.
2020
|
| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85091315300&doi=10.1108%2fMI-04-2020-0023&partnerID=40&md5=fcb12da9dd8676801e336a136810c42f |