Deposition and characterization of amorphous carbon thin film by thermal CVD
Amorphous carbon-based material has attracted a considerable attention for optoelectronic and photovoltaic applications. This remarkable element has expected to have similar properties as silicon and highly stable. This work is focused on the deposition conditions of amorphous carbon thin film for o...
| Published in: | Journal of Physics: Conference Series |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Institute of Physics Publishing
2020
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85087931836&doi=10.1088%2f1742-6596%2f1529%2f2%2f022049&partnerID=40&md5=bc71954cdfd52c65167b69c4fbc96ef4 |