A study of relative humidity sensor on micro-ball resonator

• Published in: Journal of Physics: Conference Series
• Main Author: Ali U.U.M.; Johari M.A.M.; Jusoh Z.; Rahman H.A.; Harun S.W.
• Format: Conference paper
• Language: English
• Published: Institute of Physics Publishing 2019
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85077957986&doi=10.1088%2f1742-6596%2f1371%2f1%2f012009&partnerID=40&md5=4808077a073a23e4e5eddfc1503261c6

We investigate the use of a class of whispering gallery mode optical resonators, namely, optical micro-ball resonator (MBR) as a relative humidity (RH) sensor. The MBR is fabricated using fusion splicer at the tip of standard optical fibers; single-mode fibers (SMF-28). The MBR is then optically excited by using an 8optical microfiber and was found to have a Q-factor of >105. The MBR was then employed as a humidity sensor with an RH range of between 40% to 100%. The MBR RH sensor was found to have a sensitivity 0.284 dB/%, linearity >90% and is superior to the bare microfiber in all measured parameters. The MBR RH sensor was also found to have good repeatability and stability compared to bare microfiber. © Published under licence by IOP Publishing Ltd.