2018 IEEE International conference on semiconductor electronics (ICSE) synthesis, properties and humidity detection of anodized Nb2O5 films

• Published in: IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
• Main Author: Rani R.A.; Zoolfakar A.S.; Ryeeshyam M.F.M.; Azhar N.E.A.; Mamat M.H.; Alrokavan S.; Khan H.A.; Mahmood M.R.
• Format: Conference paper
• Language: English
• Published: Institute of Electrical and Electronics Engineers Inc. 2018
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85056271343&doi=10.1109%2fSMELEC.2018.8481330&partnerID=40&md5=54490614a0a3c649c89cb806b2efaff9

Synthesis of nanoporous network Nb2O5has been conducted via anodization technique in the flouride-organic based solution. The structure morphology and the properties of the nanoporous films were characterized using field emission scanning electron microscopy (FESEM). In this research, a humidity sensor based on 1.5 micrometer thick nanoporous Nb2O5was developed and their performance was evaluated under 40% to 90% relative humidity at room temperature and different bias voltages of 2, 5 and 8 V. The highest relative sensitivity achieved was 156.2 for humidity sensor operated at bias voltage of 5 V. © 2018 IEEE.